ADTEC Step & Repeat Projection Exposure System (ADEX4000P/S)

ADTEC Step & Repeat Projection Exposure System (ADEX4000P/S) 

This projection-type automatic exposure machine for printed circuit boards features a step and repeat system. A wide surface area can be covered by a single exposure due to the fact that the machine is equipped with a magnified-projection lens.

The TTL-system alignment ensures the high-accuracy positioning of mask mark on fiducial marks. The independent vertical and horizontal variable exposure magnification function offers improved overlay accuracy across the entire surface. 

Features
 

2x magnified projection system

·        An exposure area of 200x250mm has been realized

·        The mask size can be reduced to 6x6 inches (152x152mm) enabling the reduction of mask costs and mask storage space.

An optical system with high resolution projection

·        The accuracy of lens processing, variations in lens installation method, and other factor were closely examined from the design stage to minimize the amount of distortion and to achieve a high and uniform resolution across the entire surface.

Long focus depth

·        Focal depth of ±100µm (ADEX4000P) and ±75µm (ADEX4000S) enable the processing of warped and distorted substrate in addition to substrate with irregular surfaces

High accuracy alignment stage

·        The high-accuracy linear motor equipped with a laser interferometer realize high resolution, high accuracy substrate positioning.

Reticle changer

·        The reticle (mask) changer automatically changes the reticle.

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