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Products and Services arrow FLUID DISPENSING TECHNOLOGY arrow TDK FOUP Load Port TAS300 Type-E3
TDK FOUP Load Port TAS300 Type-E3 PDF Print E-mail
Written by Asia Ecots   
Saturday, 25 November 2006

TDK FOUP Load Port TAS300 Type-E3  
 

Features

  • Complies with SEMI Standard.
    E15.1,E47,E62,E63,E64.
  • Port door has excellent durability for repetitive operations.
  • No need to adjust Loadport for each FOUP Vendor.
  • Available option--Wafer Mapping Unit.

     
 
TDK FOUP Load Port TAS300 Type-E3
  
     
 

 
     
 

CONTAMINATION FREE CLEAN TECHNOLOGY REALIZED BY TDK
Last Updated ( Saturday, 25 November 2006 )
 
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